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发明名称
Method and apparatus for the manufacturing calibration of tunnel diodes by etching
摘要
申请公布号
US3250693(A)
申请公布日期
1966.05.10
申请号
US19610114781
申请日期
1961.06.05
申请人
SONY CORPORATION
发明人
AMAYA AKIO
分类号
C25F3/12;H01L21/306;H01L21/3063;H01L29/00
主分类号
C25F3/12
代理机构
代理人
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