| 摘要 |
PROBLEM TO BE SOLVED: To enable the number of calibration points and a relative relationship to be varied, to achieve high precision measurement, and to inspect the direction and degree of distortions in an optical system that depends on the location. SOLUTION: When conducting precision measurement in a noncontact image measuring machine 10, a reference ball 34 is moved in a measurement range 14, and the precision of the noncontact image measuring machine 10 is measured, based on the center coordinates value and diameter value of the reference ball 34 measured at each travel position and the amount of travel of the reference ball 34. COPYRIGHT: (C)2006,JPO&NCIPI
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