| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzer capable of creating accurately an element distribution map of a measuring sample having a complicated shape or the like, even when having a small-sized and simple structure. SOLUTION: This X-ray analyzer equipped with a detection means for irradiating the measuring sample with an electron beam and measuring the intensity of a characteristic X-ray generated from the measuring sample is equipped with a rotation means for changing the relative position between the measuring sample and the detection means, the detection means for measuring the intensity of the characteristic X-ray from the measuring sample at a plurality of positions, and a creation means for determining an addition value of each characteristic X-ray intensity and creating the element distribution map of the measuring sample based on the addition value. COPYRIGHT: (C)2006,JPO&NCIPI
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