| 摘要 |
PROBLEM TO BE SOLVED: To reduce an installation space of a static eliminator for removing static electricity generated by air for levitating a work, in an air levitation device for levitating the plate-like work by jetting air. SOLUTION: This device levitates its work 6 by jetting air by arranging a plurality of air jetting holes 3 on a work levitating surface 2a for levitating the plate-like work 6. An ionizer 5 for ionizing the air is arranged in a supply flow passage of the air for levitating the work, to remove the static electricity generated by the jetting work levitating air. COPYRIGHT: (C)2006,JPO&NCIPI
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