发明名称 Electrode structures and method to form electrode structures that minimize electrode work function variation
摘要 Electrode structures, variable resistance memory devices, and methods of making the same, which minimize electrode work function variation. Methods of forming an electrode having a minimized work function variation include methods of eliminating concentric circles of material having different work functions. Exemplary electrodes include electrode structures having concentric circles of materials with different work functions, wherein this difference in workfunction has been minimized by recessing these materials within an opening in a dielectric and forming a third conductor, having a uniform work function, over said recessed materials.
申请公布号 US2006148248(A1) 申请公布日期 2006.07.06
申请号 US20060368455 申请日期 2006.03.07
申请人 BROOKS JOSEPH F;MOORE JOHN T 发明人 BROOKS JOSEPH F.;MOORE JOHN T.
分类号 H01L21/44;H01L21/768;H01L45/00 主分类号 H01L21/44
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