发明名称 Plasma cleansing apparatus that eliminates organic and oxidative contaminant and may effectively dissipate heat and eliminate exhaust gas and integrated system for the same
摘要 A plasma cleansing apparatus that eliminates organic and oxidative contaminant and effectively dissipates heat and eliminates exhaust gas comprises an electrode unit, an exothermic unit, a raw gas ducting unit, a raw gas supply ducting unit, and an air drawing and exhausting unit. The exothermic unit is provided with a raised exothermic plate contacting one side of the electrode unit and with an exothermic wall fitting to the plate for dissipation of the heat of electrode unit. A first gas passageway communicating with the exterior is provided at the top end of the air drawing and exhausting unit, while a second gas passageway communicating with the exterior is provided at the bottom end of the air drawing and exhausting unit; the first gas passageway works with the second gas passageway to form a gas discharge function for heat dissipation, an air drawing function for gas discharge, or the two-in-one function.
申请公布号 US2006144427(A1) 申请公布日期 2006.07.06
申请号 US20050316706 申请日期 2005.12.27
申请人 CHUN BYUNG-JOON;PARK JONG-SUNG 发明人 CHUN BYUNG-JOON;PARK JONG-SUNG
分类号 B08B3/00;H01L21/304;B08B7/00;C23F1/00;H01L21/00;H01L21/306 主分类号 B08B3/00
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