| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing method and a polishing device by which edge droops occurring at the outer peripheral edge part of an article to be polished can be easily and surely prevented, and also, productivity and yield in a manufacturing process of a final product can be improved compared with conventional polishing processes and a conventional device. <P>SOLUTION: When the article W to be polished is polished with a polishing cloth whose thickness is changed by contact with or separation from the outer peripheral edge part of the article W to be polished, the edge droops at the outer peripheral edge part of the article W to be polished can be controlled by properly adjusting a ratio of polishing pressure (Wa) applied when the polishing cloth 6 contacts and enters to the outer peripheral edge part of the article W to be polished to polishing pressure (Wb) applied when the polishing cloth 6 is separated from the outer peripheral edge part to a value other than 1 : 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
