SIMULATION DEVICE AND PLASMA DISCHARGE PROCESSING DEVICE SUPPORTING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a simulation device and a plasma discharge processing device supporting system correctly calculating electron energy distribution or the like in a plasma of the plasma discharge processing device applying a treatment in the region of atmospheric pressure by a time-dependent Boltzmann equation or the like, and deciding a control parameter.

SOLUTION: The simulation device 2 is composed of an input means 3 indicating a control parameter to be corrected out of control parameters controlling the plasma discharge processing device 10 performing a plasma discharge treatment by making an electric field between electrodes periodically or continuously change under a pressure in a region of atmospheric pressure, and setting a finishing condition of a simulation; a data base means 5 in which a collision cross section of a prime reaction of gas and electron is stored; a calculation means 6 performing the simulation by using time dependent Boltzmann equation depending on the collision cross section while correcting the indicated control parameter; and a control means 7 judging whether the result of the calculation fulfills the finishing condition or not, and deciding the value of the control parameter.

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