发明名称 METHOD FOR GROWING GROUP III NITRIDE CRYSTAL, GROUP III NITRIDE CRYSTAL AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for growing a group III nitride crystal where the group III nitride crystal being high quality from its initial growing stage and having a larger size and higher quality than usual can be grown. SOLUTION: In the method for growing the group III nitride crystal, the group III nitride crystal is grown by melting a nitrogen raw material which exists outside a molten liquid 25 where at least an alkali metal, a group III metal raw material and nitrogen are melted in the molten liquid 25. After a step that the concentration of nitrogen dissolving in the molten liquid 25 is controlled to be higher than its saturated concentration is performed, the crystal growth of the group III nitride 26 is started. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006176370(A) 申请公布日期 2006.07.06
申请号 JP20040372434 申请日期 2004.12.24
申请人 RICOH CO LTD 发明人 IWATA HIROKAZU;SARAYAMA SHOJI
分类号 C30B29/38;C30B11/06 主分类号 C30B29/38
代理机构 代理人
主权项
地址