Method of manufacturing micro structure, and method of manufacturing mold material

摘要

Disclosed herein are a method of producing microstructure and a method of producing mold, the methods permitting production of much smaller pores than before in an atmosphere where impurities are negligible and also permitting production of microstructures having a smaller size and a higher crystallinity than before with the help of the pores. The method of producing microstructure comprises a step of making pores ( 4 ) in a substrate ( 1 ) to become a mold ( 5 ) by irradiation with a focused energy beam ( 3 ) and a step of growing a microstructure ( 8 ) in the thus made pores ( 4 ). The method of producing a mold includes a step of making pores ( 4 ) by irradiating a substrate ( 1 ) to become a mold ( 5 ) with a focused energy beam ( 3 ).