GAS SHOWER HEAD, FILM FORMING DEVICE, AND FILM FORMING METHOD

摘要

A gas shower head installed opposedly to the surface of a substrate, having a large number of hole parts in the surface thereof opposed to the substrate, and feeding multiple types of film forming gases fed from a gas feed passage simultaneously to the substrate through the hole parts, comprising a shower head body having a plurality of metal members with contact faces locally joined to each other by metal diffusion by heating the plurality of the metal members under specified temperature conditions in the stacked state in vertical direction and a plurality of gas flow passages passing through the inside of the shower head body so as to cross the contact faces and formed independently of each other for each type of the film forming gases so that these film forming gases are not mixed with each other, wherein the temperature conditions are such that the locally jointed portions by metal diffusion can be separated from each other by a reheating performed later.