发明名称 LASER CUTTING METHOD AND MEMBER THAT CAN BE CUT BY IT
摘要 <p><P>PROBLEM TO BE SOLVED: To well cut and separate a member 10 to be cut by an additional structure 1 provided on the surface of a member 10 to be cut without a progressive crack from an internal tooling region 12 formed by an internal beam focus of a laser beam blocked. <P>SOLUTION: When communicating the region 12 and the surface 10F with a crack 103 by applying an external force to the member 10 to be cut, the crack 103a is formed so that a distance between a perpendicular from a tip 121 of the crack to the surface 10F and the additional structure 1 is d×tanθwhen an interval between the tip 121 close to the surface 10F of the region 12 and the surface 10F is d, and an angle between a cleavage surface of the member to be cut and the perpendicular of the surface isθ. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006179790(A) 申请公布日期 2006.07.06
申请号 JP20040373355 申请日期 2004.12.24
申请人 CANON INC 发明人 IINUMA KENJI;IRI JUNICHIRO;SUGAMA SADAYUKI;NISHIWAKI MASAYUKI;MORIMOTO HIROYUKI;INADA GENJI
分类号 H01L21/301;B23K26/38;B23K26/40;B23K101/40 主分类号 H01L21/301
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