FORMATION OF A SELF-ASSEMBLED RELEASE MONOLAYER IN THE VAPOR PHASE
摘要
A method is provided for coating a surface (10) having features (12) thereon with a self-assembled monolayer (20) for aiding release of the surface during an imprinting procedure. The method comprises exposing the surface to a vapor of a mold release agent (120).
申请公布号
WO2006019633(A3)
申请公布日期
2006.07.06
申请号
WO2005US24362
申请日期
2005.07.08
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.;JUNG, GUN-YOUNG;YONG, CHEN;WILLIAMS, STANLEY, R.;GANAPATHIAPPAN, SIVAPACKIA
