METHOD FOR PRODUCING ZnO-BASED TRANSPARENT ELECTROCONDUCTIVE FILM BY MOCVD (METAL ORGANIC CHEMICAL VAPOR DEPOSITION) METHOD

摘要

A method for producing a ZnO-based transparent electroconductive film by MOCVD (metal organic chemical vapor deposition) method using diethyl zinc having a low purity (99.99 to 98 % or 99.99 to 90 %) as a raw material, which comprises using steam (H<SUB>2</SUB>O) as an oxidizing agent and diverting the triethylaluminum contained in the raw material as an impurity to an additive (and further adding diborane as another additive), and effecting a vapor phase reaction among the above diethyl zinc, the above steam (H<SUB>2</SUB>O) and triethylaluminum (and diborane). The above method utilizes the triethylaluminum contained as an impurity in a moderately-priced diethyl zinc raw material having a low purity, as an additive, and thus can be suitably employed for producing the above film at a reduced cost.