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发明名称
Method for fabricating gate spacer of semiconductor device
摘要
申请公布号
KR100597768(B1)
申请公布日期
2006.07.06
申请号
KR20030102078
申请日期
2003.12.31
申请人
发明人
分类号
H01L21/336;H01L21/28;H01L21/3205;H01L21/4763
主分类号
H01L21/336
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