发明名称 METHOD FOR CONVERTING SURFACE PHYSICAL PROPERTIES OF ORGANIC THIN FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for converting the surface physical properties of an organic thin film with high efficiency, by photoirradiating the organic thin film containing a photosensitive compound formed on a substrate. <P>SOLUTION: The method for converting surface physical properties of an organic thin film is characterized, by (A) photoirradiating the organic thin film containing a photosensitive compound, formed on a substrate via an organic solvent or (B) photoirradiating the organic thin film while being heated to 50-250&deg;C, with the photosensitive compound having a protective group which is released by photoirradiation. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006178274(A) 申请公布日期 2006.07.06
申请号 JP20040372988 申请日期 2004.12.24
申请人 NIPPON SODA CO LTD 发明人 SASO HARUO
分类号 G03F7/004 主分类号 G03F7/004
代理机构 代理人
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