| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature measurement method and a temperature measuring device for measuring the temperature of a wafer without being affected by external turbulence of the light of a halogen lamp, when measuring the temperature of the wafer by a radiation thermometer in a wafer-heating apparatus with the halogen lamp as a heat source. SOLUTION: The wavelength of light radiated from the halogen lamp is cut partially by a filter, and the cut wavelength region is utilized, thus measuring temperature using the radiation thermometer with the wavelength region as a measurement wavelength. COPYRIGHT: (C)2006,JPO&NCIPI
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