| 摘要 |
PROBLEM TO BE SOLVED: To enhance frequency responsiveness without lowering sensitivity. SOLUTION: In this capacitance acceleration sensor, a substrate 20 is mounted on a base 30, and a frame part 21, a mass part 22, and a diaphragm 23 are integrally formed on the substrate 20, with the diaphragm 23 supporting the mass part 22 on the frame part 21. A prescribed air gap 51 is formed between the mass part 22, the diaphragm 23, and the base 30. A fixed electrode 41 for detecting the displacement of the mass part 22 as a change in capacitance is formed on the base 30. The air gap 51 is extended/formed on an inner circumferential-side portion of the frame part 21 to form a groove 24 in the circumferential-side portion engaged on the air gap 51. Air damping can be reduced without decreasing an area for detecting capacitance. COPYRIGHT: (C)2006,JPO&NCIPI
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