| 摘要 |
PROBLEM TO BE SOLVED: To simply uniformalize the discharge quantity of a liquid from a plurality of nozzles arranged side by side. SOLUTION: In the coating method of applying the liquid discharged from the plurality of the nozzles 22 arranged side by side on a substrate 1, the discharge quantity from each nozzle is uniformized by equalizing the diameter D of a discharge hole 22A of each nozzle 22 and adjusting the length L of the discharge hole 22A. COPYRIGHT: (C)2006,JPO&NCIPI
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