| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for storing hexafluoroacetylacetone which is used in fields of semiconductor manufacturing and cleaning, for a long period of time without decreasing its purity. SOLUTION: Hexafluoroacetylacetone is stored in a metal container whose inner face is plated with Cr, or in an aluminum container, an Al-Mg alloy container or an Al-Mg-Si alloy container each subjected to a pretreatment. In addition, the pre-treatment is a cleaning treatment with hexafluoroacetylacetone, an anneal treatment in an H<SB>2</SB>atmosphere, or a plasma treatment with H<SB>2</SB>. COPYRIGHT: (C)2006,JPO&NCIPI
|
