MICRO-MACHINING SYSTEM EMPLOYING A TWO STAGE BEAM STEERING MECHANISM

摘要

A system for micromachining a substrate, including at least one source of pulsed radiant energy providing at least one pulsed beam of radiation along an optical axis, the at least one pulsed beam including multiple pulses separated by a temporal pulse separation; and a changeable output beam propagator disposed between the at least one source of radiant energy and the substrate and being operative to output a plurality of output beams each output beam being output at a selected angle relative to the optical axis, the angle being changeable in an amount of time that is less than the temporal pulse separation.