发明名称 Flash memory device and fabricating method thereof
摘要 A flash memory device includes a floating gate formed on a substrate, sidewall gates formed on sidewalls of the floating gate, an interlayer insulating layer formed the floating gate and the sidewall gates, and a control gate formed on the interlayer insulating layer. The fabricating method of a flash memory device includes forming a floating gate on a substrate, forming sidewall gates at sidewalls of the floating gate, forming an interlayer insulating layer on the floating gate and the sidewall gates, and forming a control gate on the interlayer insulating layer.
申请公布号 US2006145236(A1) 申请公布日期 2006.07.06
申请号 US20050320626 申请日期 2005.12.30
申请人 DONGBUANAM SEMICONDUCTOR INC. 发明人 LEE SANG B.
分类号 H01L29/76 主分类号 H01L29/76
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