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发明名称
Metallisierung in Halbleitervorrichtungen
摘要
申请公布号
DE69834686(D1)
申请公布日期
2006.07.06
申请号
DE19986034686
申请日期
1998.03.17
申请人
INFINEON TECHNOLOGIES AG
发明人
TOBBEN, DIRK;SPULER, BRUNO;GUTSCHE, MARTIN;WEIGAND, PETER
分类号
H01L21/768;H01L21/302;H01L21/3065;H01L21/3213;H01L23/12;H05K1/00;H05K3/06;H05K3/22;H05K3/24
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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