| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized nondestructive inspection device having high measurement accuracy. SOLUTION: A pulsed electron beam 22 is allowed to enter a target 18 by an electron accelerator 16, to thereby generate a bremsstrahlung X-ray, and an inspection object 10 is irradiated therewith. The X-ray 28 transmitted through the inspection object 10 is received by a scintillator 30, and generated light is converted into a corresponding electric signal 34 by a photodetector 32. The electric signal 34 is integrated during a period T when the pulsed electron beam is generated, or during a period T' in consideration of a signal delay of the detector. The integration is repeated relative to a plurality of pulses. Thus, the transmission quantity of the X-ray through the inspection object 10 is measured from the integrated value, and a shape characteristic of the inspection object 10 can be inspected. COPYRIGHT: (C)2006,JPO&NCIPI
|
