| 摘要 |
PROBLEM TO BE SOLVED: To provide a pickup device, sucking, holding, carrying and releasing a small-sized transported article in a liquid maintained in a clean environment. SOLUTION: This pickup device uses a pickup nozzle having a substantially cylindrical cylinder having a suction opening at one end part and a piston movable in the interior of the cylinder and forming a substantially closed space taking only the suction opening as an opening part in cooperation with the cylinder inner wall. The substantially closed space is filled with a liquid constituting an environment for sucking, holding, transporting and releasing the transported article. COPYRIGHT: (C)2006,JPO&NCIPI
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