| 摘要 |
PROBLEM TO BE SOLVED: To obtain a floating unit capable of holding a substrate in a securely non-contacting state even at the end of a wavy glass substrate from which air is easy to escape, and obtain a floating apparatus provided with the same. SOLUTION: A rocking substrate 31 provided with a porous unit 41 is supported by a base mount 21 by a spherical bearing. Moreover, air is interposed between the base mount 21 and the rocking substrate 31 to allow the rocking substrate 31 and the porous unit 41 to rock along the spherical surface. By this rocking, the upper surface 12a of an improved floating unit 12 ejecting air can freely tilt. When the wavy glass substrate is mounted, the upper surface 12a of the improved floating unit 12 copies the tilt of the substrate to be in a tilted state. When air is ejected in this state, the substrate is floated in a state parallel to the upper surface 12a. The floating force securely acts on the substrate. Consequently, the problems can be solved. COPYRIGHT: (C)2006,JPO&NCIPI |
