| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction device capable of adsorbing an insulating substrate. SOLUTION: A first and second electrodes 11, 12 are prepared on a substrate 10 in which front surface is insulated in such a manner that they are exposed, and the insulating substrate is arranged so that it may contact with front surfaces of the first and second electrodes, or approach to them in proximity. Since an electric field great in volume rate of change is formed between the first and second electrodes, a substrate 7 is sucked to the front surface of an adsorber 1 by gradient force. Since a magnitude of the gradient force depends on a magnitude of rate of change of electric field, the electric field of 1.0×10<SP>6</SP>V/m or more is desired to be formed by applying voltage between the first and second electrodes 11, 12. COPYRIGHT: (C)2006,JPO&NCIPI |
