发明名称 DEVICE FOR INSPECTING MEMORY DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a device for inspecting a memory device capable of improving the inspecting efficiency of a memory device. SOLUTION: A test system for the memory device is provided with a tester 102 for applying a plurality of different redundancy tests on the memory device based on a plurality of different testing conditions. The test system is provided with a wafer test host 101. The tester 102 synthesizes the test results of a plurality of different tests to obtain a synthetic test result. The wafer test host 101 is provided with a repair device 103 for determing the treatment of the memory device based on the synthetic test result. The repair device 103 treats the memory device based on the determination result. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006179649(A) 申请公布日期 2006.07.06
申请号 JP20040370733 申请日期 2004.12.22
申请人 NEC ELECTRONICS CORP 发明人 KUROKAWA EIJI
分类号 H01L21/66;G01R31/28;G11C29/44;G11C29/56 主分类号 H01L21/66
代理机构 代理人
主权项
地址