发明名称 Method for forming gate of semiconductor device
摘要 There is provided a method for forming a gate using a gate layout of a semiconductor device. The layout includes an active region with a stepped side boundary, a plurality of gates crossing over the active region, and tabs attached to the gates on the side boundary of the active region, wherein two tabs adjacent by a topology of the stepped side boundary are disposed in an oblique direction. The gates can be patterned.
申请公布号 US2006148158(A1) 申请公布日期 2006.07.06
申请号 US20050311804 申请日期 2005.12.19
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO MIN-HEE;KIM JI-YOUNG
分类号 H01L21/8238 主分类号 H01L21/8238
代理机构 代理人
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