| 摘要 |
An alignment template goodness qualification method receives a pattern image and a pattern based alignment template and performs template goodness measurement using the pattern image and the pattern based alignment template to generate template goodness result output. A template qualification is performed using the template goodness result to generate template qualification result output. If the template qualification result is acceptable, the pattern based alignment template is outputted as the qualified pattern based alignment template. Otherwise, an alternative template selection is performed using the pattern image, the pattern based alignment template and the template goodness result to generate alternative pattern based alignment template output. The template goodness measurements include signal content measurement, spatial discrimination measurement and pattern ambiguity measurement.
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