发明名称 |
Device comprising multi-layered thin film having excellent adhesive strength and method for fabricating the same |
摘要 |
A device comprises a multi-layered thin film having excellent adhesion due to the method of fabricating the same. More particularly, the device includes a multi-layered thin film consisting of a tantalum nitride layer, a tantalum layer formed on the tantalum nitride layer, and a gold thin film formed on the tantalum layer.
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申请公布号 |
US2006145349(A1) |
申请公布日期 |
2006.07.06 |
申请号 |
US20050250120 |
申请日期 |
2005.10.14 |
申请人 |
KIM JU-YONG;KWEON HO-JIN;KIM JAE-JEONG;AHN JIN-GOO;KWON OH-JOONG |
发明人 |
KIM JU-YONG;KWEON HO-JIN;KIM JAE-JEONG;AHN JIN-GOO;KWON OH-JOONG |
分类号 |
H01L23/48 |
主分类号 |
H01L23/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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