发明名称 Device comprising multi-layered thin film having excellent adhesive strength and method for fabricating the same
摘要 A device comprises a multi-layered thin film having excellent adhesion due to the method of fabricating the same. More particularly, the device includes a multi-layered thin film consisting of a tantalum nitride layer, a tantalum layer formed on the tantalum nitride layer, and a gold thin film formed on the tantalum layer.
申请公布号 US2006145349(A1) 申请公布日期 2006.07.06
申请号 US20050250120 申请日期 2005.10.14
申请人 KIM JU-YONG;KWEON HO-JIN;KIM JAE-JEONG;AHN JIN-GOO;KWON OH-JOONG 发明人 KIM JU-YONG;KWEON HO-JIN;KIM JAE-JEONG;AHN JIN-GOO;KWON OH-JOONG
分类号 H01L23/48 主分类号 H01L23/48
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