| 摘要 |
PROBLEM TO BE SOLVED: To obtain a spray developing device capable of blowing a spray of a developing solution under a high pressure, to provide a developing method by which a spray of the developing solution is blown under a high pressure and through holes having a small diameter are deeply formed and to produce a laminated ceramic substrate. SOLUTION: The spray developing device has a tank 51 in which a developing solution is stored, nozzles 53 which blow a spray of the developing solution having <=100μm diameter and a pump 55 which supplies the developing solution in the tank 51 to the nozzles 53 under >=2 MPa pressure. A molding containing at least a photo-curable resin is partially cured by exposure and the uncured part is removed by blowing a spray of the developing solution having <=100μm diameter on the uncured part under a pressure of >=2 MPa. |
