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发明名称
CALIBRATION APPARATUS AND METHOD FOR SCANNING PROBE MICROSCOPE
摘要
申请公布号
KR20060078681(A)
申请公布日期
2006.07.05
申请号
KR20040116993
申请日期
2004.12.30
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS
发明人
LEE, HAK JOO;KIM, JAE HYUN;HUR, SHIN;HAN, SEUNG WOO;CHO, KI HO;AHN, HYUN GYUN;OH, CHUNG SEOG
分类号
G01Q40/00
主分类号
G01Q40/00
代理机构
代理人
主权项
地址
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