| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to prevent various influences caused by fine particles and to easily manufacture a high quality element, by performing rubbing processing while sucking the fine particles caused from at least one side between a substrate and a rubbing processing member. SOLUTION: A part of an oriented film or a hair, etc., of cloth material 22 are generated from a contact part between the substrate 20 and a rubbing roller 21 as the fine particles. A sucking member 23 arranging a sucking hole 23a upward and the left side of the contact part is provided to suck the fine particles generated in the contact part from the sucking hole 23a and to eject them out of a system. As the sucking member 23, though it may be one forcedly sucking air by a sucking fan, etc., an outlet is preferred to be provided out of doors since the necessity that a high density filter, etc., is provided exists when the outlet is provided in a clean room. At this time, the sucking hole 23a is provided with a shape prolonged in the axial direction of the rubbing roller 21, and is provided with an opening position arranged nearly parallel to the contact part between the substrate 20 and the rubbing roller 21. |
