ANTENNA IN INDUCTIVELY COUPLED PLASMA,申请号KR20040116221-传众专利搜索

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发明名称	ANTENNA IN INDUCTIVELY COUPLED PLASMA
摘要
申请公布号	KR20060077379(A)	申请公布日期	2006.07.05
申请号	KR20040116221	申请日期	2004.12.30
申请人	KOREA ELECTRO TECHNOLOGY RESEARCH INSTITUTE	发明人	KIM, JEE HYUN;RIM, GEUN HIE;NIKIFOROV S.A.
分类号	H05H1/34	主分类号	H05H1/34
代理机构		代理人
主权项
地址

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