CARBONITRIDE COATED COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING THEREOF,申请号IL20030156699-传众专利搜索

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发明名称	CARBONITRIDE COATED COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT AND METHOD OF MANUFACTURING THEREOF
摘要
申请公布号	IL156699(A)	申请公布日期	2006.07.05
申请号	IL20030156699	申请日期	2003.06.29
申请人	LAM RESEARCH CORPORATION	发明人
分类号	H01L21/3065;B01J19/02;C23C16/44;H01J37/32	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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