Method for conditioning a polishing pad surface,申请号EP20010108300-传众专利搜索

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发明名称	Method for conditioning a polishing pad surface
摘要
申请公布号	EP1247616(B1)	申请公布日期	2006.07.05
申请号	EP20010108300	申请日期	2001.04.02
申请人	INFINEON TECHNOLOGIES AG	发明人	GLASHAUSER, WALTER;UTESS, BENNO;PURATH, ANDREAS DR.
分类号	B24B53/007;B24B49/16;B24B37/04;B24B53/00;H01L21/304	主分类号	B24B53/007
代理机构		代理人
主权项
地址

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