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发明名称
WAFER EDGE EXPOSE UNIT HAVING MOVABLE APERTURE
摘要
申请公布号
KR20060078837(A)
申请公布日期
2006.07.05
申请号
KR20040118182
申请日期
2004.12.31
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
UHM, KYOUNG SAM
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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