| 摘要 |
The accelerometer has a mobile electrode (2) and fixed electrodes (4A, 4B) with respect to a substrate (5) and equipped with a set of mobile fingers (7) and fixed fingers (8A, 8B), respectively. Each mobile finger is disposed between two adjacent fixed fingers to form an interdigital comb microstructure (20). A mobile electrode (40) is associated to a fixed electrode (42) to form another interdigital comb microstructure (22) overlapped with the microstructure (20). An independent claim is also included for a process for manufacturing an accelerometer. |
