发明名称 COMPOSITE KINEMATIC COUPLING
摘要 A fitting for aligning wafer carriers as part of an automated manufacturing process may be referred to as a kinematic coupling. The kinematic coupling of the present invention may comprise a base plate of a first material and contact components of a second material. The contact components may be provided to the base plate as part of an overmolding operation and may be held in place by either chemical fastening or mechanical fastening.
申请公布号 EP1444081(A4) 申请公布日期 2006.07.05
申请号 EP20020759243 申请日期 2002.08.05
申请人 ENTEGRIS, INC. 发明人 BHATT, SANJIV, M.;EGGUM, SHAWN, D.
分类号 B29C45/14;B29C45/16;B29K69/00;B29K71/00;G03F7/20;H01L21/673;H01L21/677;H01L21/68 主分类号 B29C45/14
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