APPARATUS FOR COOLING A PROCESS CHAMBER,申请号KR20040117913-传众专利搜索

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发明名称	APPARATUS FOR COOLING A PROCESS CHAMBER
摘要
申请公布号	KR20060078314(A)	申请公布日期	2006.07.05
申请号	KR20040117913	申请日期	2004.12.31
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	LEE, KYUNG HYUNG
分类号	H01L21/22;H01L21/205	主分类号	H01L21/22
代理机构		代理人
主权项
地址

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