ARM APPARATUS FOR PREVENTING WAFER COLLISION IN CONVENTION TYPE WET EQUIPMENTS,申请号KR20040115269-传众专利搜索

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发明名称	ARM APPARATUS FOR PREVENTING WAFER COLLISION IN CONVENTION TYPE WET EQUIPMENTS
摘要
申请公布号	KR20060075898(A)	申请公布日期	2006.07.04
申请号	KR20040115269	申请日期	2004.12.29
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	LIM, WOO CHAN
分类号	H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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