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发明名称
METHOD FOR MANUFACTURING ISOLATION LAYER IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060075007(A)
申请公布日期
2006.07.04
申请号
KR20040113551
申请日期
2004.12.28
申请人
HYNIX SEMICONDUCTOR INC.
发明人
CHUNG, CHAI O
分类号
H01L21/76;H01L21/205;H01L21/31
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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