发明名称 Methods of making a three terminal magnetic sensor having a collector region electrically isolated from a carrier substrate body
摘要 In one illustrative example, a three terminal magnetic sensor includes a collector region made of a semiconductor material, a base region, and an emitter region. An insulator layer is formed between the collector region and a carrier substrate body which carries the three terminal magnetic sensor. The insulator layer serves to reduce a capacitance otherwise present between the collector region and magnetic media at a magnetic field sensing plane of the three terminal magnetic sensor. Thus, the insulator layer electrically isolates the collector region from the carrier substrate body. The structure may be formed through use of a separation by implanting oxygen (SIMOX) technique or a wafer-bonding technique, as examples.
申请公布号 US7071010(B1) 申请公布日期 2006.07.04
申请号 US20050125864 申请日期 2005.05.10
申请人 HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B.V. 发明人 LILLE JEFFREY S.
分类号 H01L21/00 主分类号 H01L21/00
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