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发明名称
DEVICE FOR COATING PLURAL NUMBER WAFER WITH PHOTORESIST IN TRACK EQUIPMENT
摘要
申请公布号
KR20060075905(A)
申请公布日期
2006.07.04
申请号
KR20040115278
申请日期
2004.12.29
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
LEE, SEUNG HO
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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