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发明名称
CLEANING APPARATUS AND GATE OXIDE PRE-CLEANING METHOD
摘要
申请公布号
KR20060076109(A)
申请公布日期
2006.07.04
申请号
KR20040115805
申请日期
2004.12.29
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
KIM, WAN SHICK
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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