发明名称 System and method to improve image sensor sensitivity
摘要 A method is disclosed for forming at least one image sensor with improved sensitivity along with at least one transistor device. The method comprises forming at least a portion of the transistor device on a substrate, forming the image sensor by doping a predetermined area separated from the transistor device by a minimum predetermined distance, forming an etch stop layer for covering a contact area of the transistor device, removing at least a portion of the etch stop layer in the predetermined area for exposing the image sensor, and covering the image sensor and the transistor device by at least one transparent protection layer.
申请公布号 US7071019(B2) 申请公布日期 2006.07.04
申请号 US20040944243 申请日期 2004.09.16
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 ZHANG WEI;LIN CHIAN-LIANG;YANG JUNG-CHEN;HUNG CHIA-CHUN;LIU SHIH-MIN
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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