WAFER ALIGNER FOR THE ION IMPLANT EQUIPMENT,申请号KR20040115299-传众专利搜索

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发明名称	WAFER ALIGNER FOR THE ION IMPLANT EQUIPMENT
摘要
申请公布号	KR20060075924(A)	申请公布日期	2006.07.04
申请号	KR20040115299	申请日期	2004.12.29
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	KANG, YOUNG SHIN
分类号	H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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