发明名称 Production method of gas sensor
摘要 To provide a method for producing a sensing film for gas sensors by sintering particles comprising a metal or a metal oxide on a substrate, where the sensing film for gas sensors having excellent sensor properties such as sensitivity and responsibility can be easily and simply formed. A nano-meter order particle ( 100 ), a dispersant ( 110 ) for preventing aggregation of the particles ( 100 ), and a scavenger ( 120 ) for trapping the dispersant ( 110 ) at the sintering are mixed in a solvent ( 130 ) to prepare a paste body ( 140 ), and this paste body ( 140 ) is coated on a base material and fired, thereby forming a sensing film.
申请公布号 US7070829(B2) 申请公布日期 2006.07.04
申请号 US20030386831 申请日期 2003.03.12
申请人 ULVAC, INC. 发明人 TOTOKAWA MASASHI;MATSUBA YORISHIGE;MISAWA YOSHIHISA;GOTOH HIDEYUKI;OSAKO KATSUHISA;ODA MASAAKI;SAITO NORIMICHI;SUZUKI TOSHIHIRO;ABE NORIYUKI
分类号 B05D5/12;B05D3/02;G01N27/12 主分类号 B05D5/12
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