PROCESS CHAMBER WITH PARTICLE COLLECTOR,申请号KR20040114247-传众专利搜索

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发明名称	PROCESS CHAMBER WITH PARTICLE COLLECTOR
摘要
申请公布号	KR20060075456(A)	申请公布日期	2006.07.04
申请号	KR20040114247	申请日期	2004.12.28
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	KIM, JOUN JIN
分类号	H01L21/205;H01L21/02	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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